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Metal Gas Filter×ピー・ジェイ - List of Manufacturers, Suppliers, Companies and Products

Metal Gas Filter Product List

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Hastelloy all-metal gas filter

Hastelloy all-metal gas filter

Using Hastelloy for all materials.

This is a gas filter manufactured by Purelon Japan Co., Ltd. It efficiently removes particles larger than 0.003 μm even under high flow rates and high differential pressures. We offer a wide range of products from low flow rates of about 10 L/min to medium flow rates of about 250 L/min. Compared to conventional metal filters, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size.

  • Semiconductor inspection/test equipment
  • CVD Equipment
  • Gas Filters

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Low pressure loss metal gas filter

Low pressure loss metal gas filter

Significantly improve yield.

This is a gas filter manufactured by Purelon Japan Co., Ltd. All filter components are made of SUS316L, ensuring high corrosion resistance and excellent heat resistance without the risk of secondary generation of substances. When nitrogen gas (N2) is flowed at an inlet pressure of 0.2 MPa, the outlet pressure loss is △0.05 MPa, achieving a flow rate of 90 SLM. Additionally, under steady flow and pulsation conditions, a filtration precision of 0.003 μm has been confirmed using CNC, significantly improving yield in submicron ULSI manufacturing.

  • Semiconductor inspection/test equipment
  • CVD Equipment
  • Gas Filters

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Coarse filter all-metal gas filter

Coarse filter all-metal gas filter

Supports a wide range of filtration precision.

This is a gas filter manufactured by Purelon Japan Co., Ltd. It supports a wide range of filtration precision from 0.1 to 10 μm under steady flow and pulsation conditions. Corrosive materials are not used in the filter components, so there is no risk of corrosion or secondary byproducts. By using a dedicated baking heater in conjunction, we achieved a degassing (moisture content) of 1.2 ppb in APIMS measurements. With continued use, levels down to 0.1 ppb are possible.

  • Semiconductor inspection/test equipment
  • CVD Equipment
  • Gas Filters

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High filtration precision all-metal gas filter

High filtration precision all-metal gas filter

Compact size for handling higher gas flow.

This is a gas filter manufactured by Purelon Japan Co., Ltd. It uses SUS316L for all materials. It efficiently removes particles larger than 0.003μm even under high flow rates and high differential pressures. Compared to conventional products, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size. We offer a wide range of options from low flow rates of about 10L/min to medium flow rates of about 250L/min.

  • Semiconductor inspection/test equipment
  • CVD Equipment
  • Gas Filters

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